Major Equipment
Mask Aligner
2014-09-10 11:18:33
Feature
-
MEMS (Bio-MEMS, Optical-MEMS)
-
TSP(Touch Screen Panel)
-
FPD(Flat Panel Display), RF Microwave
- LED, Opto-electronics
Substrate Size
Resolution
Alignment Accuracy
Wave Length
UV Intensity
UV Beam Uniformity
Contact Mode
Microscope
Manual, PLC, Touch
piece, 4", 6"
1㎛ in vacuum contact with Thin PR@Si Wafer
1 ㎛
365~436nm /I,H,G line
≤max25mW/cm²
±3%~±5%
Vacuum/Hard/Soft
Dual CCD Zoom Microscope
Semi Auto
6”, 8”, 12
≤max20mW/cm²
±3%~±5%
Vacuum/Hard/Soft/Poximity
Dual CCD Zoom Microscope